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Position Control of a Low-Energy C-Core Reluctance Actuator in a Motion System

Mohammad Al Saaideh, Yazan al-rawashdeh, Natheer Alatawneh, Khaled Aljanaideh, Mohammad Al Janaideh

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Abstract

This paper introduces a position control system for a motion stage driven by a low-energy C-core reluctance actuator. The central concept explored here is the utilization of a variable air gap to enable energy-efficient operation of the motion stage. First, we show the design and mathematical model of the reluctance-actuated motion system (RAMS). Then, by analyzing open-loop responses of the RAMS under various conditions including variable air gaps and different excitation voltages, we show that using variable air gap can reduce the re- quired current. Finally, the paper formulates a control approach that combines a feedforward controller to linearize the RAMS’s dynamic behavior and a state feedback controller to achieve tracking performance. Experimental results demonstrate the effectiveness of this control approach in achieving tracking objectives with errors that are less than 2% for constant desired displacement and less than 10% for tracking a sinusoidal reference signal.

Index terms

Semiconductor Manufacturing Motion Control